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Semiconductor Fabrication Equipment

Common Coolant Types and their Uses in Liquid Cooling Systems

Introduction

As power densities and thermal loads continue to increase in crowded electronic systems, and specific analytical and diagnostic testing processes demand more temperature stabilization for improved accuracy and results, more equipment designers, R&D labs and diagnostic laboratories are turning to liquid cooling solutions for better thermal management. Optimal cooling fluids improve accuracy of results, improve equipment performance, minimize downtime, reduce maintenance costs, ensure safety and can help meet environmental compliance.

Thermoelectric Chillers for Semiconductor Metrology & Inspection Systems




The complex semiconductor fabrication requires multiple tests between processing steps to inspect defects as well as measure dimensional properties. Automated optical inspection systems require a thermal solution to dissipate waste heat and keep imaging sensors at a very precise temperature control well below ambient. Thermoelectric-based recirculating chillers provide the temperature stabilization, low pulsation and high reliability needed.



OEM Perspectives: Recirculating Chillers for Semiconductor Metrology & Inspection Systems

Introduction

Semiconductor metrology is critical in the semiconductor fabrication process. The complex nature of semiconductor fabrication now requires multiple test stages in between processing steps. Thin film semiconductor wafers are tested using several techniques including ellipsometry and reflectometry. Sophisticated optical equipment is used to inspect for defects as well as for accurate dimensional measurements. Manufacturers of optical inspection systems must integrate a thermal solution for temperature stabilization of optical components.




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Thermoelectric Chillers for Semiconductor Metrology & Inspection Systems

Introduction

The implementation of automated metrology systems has been a key to achieving cost effective semiconductor fabrication. The complex nature of semiconductor fabrication requires multiple tests between processing steps to inspect defects as well as measure dimensional properties including thickness, refractive index, resistivity and stress of the thin films. Because thermal noise can impact the image resolution of sensitive optical components in automated metrology systems, a thermal management system is required.




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AA-480-48-44 Air-to-Air

The AA-480-48-44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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AA-480-24-44 Air-to-Air

The AA-480-24-44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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AA-230-48-D44 Air-to-Air

The AA-230-48-D44 is an Air-to-Air thermoelectric assembly (TEA) that uses impingement flow to transfer heat. It offers dependable compact performance by cooling objects via convection. Heat is absorbed and dissipated through high density heat exchangers equipped with air ducted shrouds and brand name fans. The heat pumping action occurs from custom designed thermoelectric modules that achieve a high coefficient of performance (COP) to minimize power consumption.


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MRC300-DH2-DV Liquid Chiller

The MRC300-DH2-DV is a bench top re-circulating chiller that offers dependable, compact performance by controlling the temperature of a coolant in a liquid circuit. The coolant is re-circulated using a pump with high MTBF. Heat from coolant is absorbed by a heat exchanger and dissipated thru high density heat sinks equipped with brand name fans. The thermoelectric modules are custom designed to achieve long life operation. The unit is regulated with an easy to use digital temperature controller with push button interface.


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