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Semiconductor Fabrication Equipment

MRC150-DH2-DV Liquid Chiller

The MRC150-DH2-DV is a bench top re-circulating chiller that offers dependable, compact performance by controlling the temperature of a coolant in a liquid circuit. The coolant is re-circulated using a pump with high MTBF. Heat from coolant is absorbed by a heat exchanger and dissipated thru high density heat sinks equipped with brand name fans. The thermoelectric modules are custom designed to achieve long life operation. The unit is regulated with an easy to use digital temperature controller with push button interface.


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Semiconductor Metrology Equipment

The key to cost effective production has been through implementation of automated metrology systems. Traditionally, metrology refers to measurement of any type of physical dimensions. In the film manufacturing industry automated metrology systems measure parameters such as thickness, refractive index, resistivity and stress of the thin films. However, these systems are not only used to track the physical properties of the material, but also to feed this information back into the manufacturing process.

Thermal Management for Semiconductor Metrology Equipment

Introduction

The history of thin film semiconductor manufacturing has been one of constant process improvement. This constant process improvement was necessary in order to establish cost effective high yielding production lines as they struggled to keep pace with Moore’s law. All of this has been made possible through the integration of automated metrology systems with statistical process control. 




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Liquid to Liquid Ambient Cooling Systems for Semiconductor Tools

Introduction

Cooling and temperature control systems are used throughout semiconductor fabrication facilities. In fabrication facilities both large and small, hundreds to thousands of cooling systems are installed and operate continuously. The processes employed are usually setup as copy-exact, which means the process systems are developed and transferred from the OEM of the process tool. These critical production tools used in semiconductor fabrication facilities are required to be reliable and easy to service to deliver minimum downtime.




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